For citations:
Chu T.S. Computer Simulation of the Thin Film’s Growth Process during Thermal Vacuum Evaporation. Journal of the Russian Universities. Radioelectronics. 2016;(6):22-31. (In Russ.)
Chu T.S. Computer Simulation of the Thin Film’s Growth Process during Thermal Vacuum Evaporation. Journal of the Russian Universities. Radioelectronics. 2016;(6):22-31. (In Russ.)