For citations:
Korobkov M.A., Barabanov V.S. Probabilistic Approach to Assessing Photolithography Quality in the Production of Printed Circuit Boards. Journal of the Russian Universities. Radioelectronics. 2025;28(1):17-34. (In Russ.) https://doi.org/10.32603/1993-8985-2025-28-1-17-34