S. V. Sidorova
Bauman Moscow State Technical University
Russian Federation

Svetlana V. Sidorova, Cand. Sci. (Eng.) (2016), Associate Professor of the Department of Electronic Technologies in Mechanical Engineering. The author of more than 200 scientific publications. Area of expertise: micro- and nanoelectronics; thin-film coatings and nanoscale structures; vacuum technological processes and equipment.

A. D. Kouptsov
Bauman Moscow State Technical University
Russian Federation

Alexey D. Kouptsov, Master's Degree in Electronics and Nanoelectronics. Assistant, Postgraduate student of the Department of Electronic Technologies in Mechanical Engineering.The author of 54 scientific publications. Area of expertise: microelectronics; atomic force microscopy; vacuum technological processes and equipment

I. E. Pimenov
Federal State Unitary Enterprise "NAMI"
Russian Federation

Ilya E. Pimenov, Master's Degree in Electronics and Nanoelectronics. Postgraduate student. The author of more than 14 scientific publications. Area of expertise: microelectronics; microwave electronics; energy storage; power plants of vehicles; vacuum technological processes and equipment.