For citations:
Sidorova S.V., Pimenov I.E., Kouptsov A.D., Felde A.A. Composite Layer Formation with Island Nanostructures in Vacuum. Journal of the Russian Universities. Radioelectronics. 2025;28(2):94-106. (In Russ.) https://doi.org/10.32603/1993-8985-2025-28-2-94-106