For citations:
Baraban A.P., Dmitriev V.A., Drozd A.V., Moshnikov V.A. Molecular Layering Synthesis and Investigation of Nanostructured Oxide Layers in High Aspect Ratio Substrates. Journal of the Russian Universities. Radioelectronics. 2024;27(4):61-71. (In Russ.) https://doi.org/10.32603/1993-8985-2024-27-4-61-71