For citations:
Ershov A.A., Chekmezov K.N., Burovikhin A.P., Nikitin A.A., Abolmasov S.N., Stashkevich A.A., Terukov E.I., Eskov A.V., Semenov A.A., Ustinov A.B. Effect of Annealing Treatment on the Optical Properties of Silicon Nitride Waveguides. Journal of the Russian Universities. Radioelectronics. 2024;27(2):119-131. (In Russ.) https://doi.org/10.32603/1993-8985-2024-27-2-119-131
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