S. D. Fedotov
National Research University of Electronic Technology
Russian Federation

Dipl.-engineer on "Chemical technology of single crystals, materials and electronic devices" (2014, Dmitry Mendeleev  University of Chemical Technology of Russia), postgraduate  student of National Research University of Electronic  Technology. Research engineer in Laboratory of analysis and development of technologies of EPIEL JSC (Moscow,  Zelenograd). The author of 20 scientific publications. Area  of expertise: epitaxy of silicon on dielectric substrates; development of the formation processes of SOI, heteroepitaxial structures of silicon on sapphire (SOS),  intended for the manufacture of radiation hardened circuits, microwave devices and strain gauges; the processes of forming wafers for power electronics

S. P. Timoshenkov
National Research University of Electronic Technology
Russian Federation

D.Sc. in Engineering (2004), Professor (2007), the chief of the Department of of Microelectronics of National Research  University of Electronic Technology. Laureate of the Russian  Federation Government award (2007). The author of 180  scientific publications. Area of expertise: study of physic- chemical processes of splicing and the formation of multi- layered, complex structures for microelectronics and  Microsystem technology, the formation of silicon on insulator (SOI), development of technology of manufacture and Assembly of a MEMS sensor

E. M. Sokolov
Epiel JSC
Russian Federation

Dipl.-engineer on chemistry (1975, Moscow State University), leading researcher of the EPIEL JSC (Moscow,  Zelenograd). The author of more than 90 scientific  publications. Area of expertise: semiconductor materials  science, in particular, the technology of creation of  structures of various types based on silicon and its compounds, intended for the manufacture of devices and integrated circuits

V. N. Statsenko
Epiel JSC
Russian Federation

Dipl.-engineer (1981, Moscow Institute of Electronic Technology (MIET)), CEO of EPIEL JSC (Moscow,  Zelenograd). The author of more than 40 scientific  publications. Area of expertise: conducting epitaxial  processes; homo- and heteroepitaxy semiconductor  compounds, including compounds "semiconductor on insulator"; rapid thermal processes