The Crystal Structure and Properties of Barium Zirconate Titanate and Barium Stannate Titanate Thin Films for Microwave Applications
Abstract
Structural and radio frequency (RF) dielectric properties of thin films of ferroelectric solid solutions BaZrxTi1-xO3 and BaSnxTi1-xO3 obtained by RF magnetron sputtering of ceramic targets on Pt/ r-cut of Al2O3 sapphire substrate are investigated. A high tunability of thin layers and low values of dielectric loss acceptable for microwave application have been revealed.
About the Authors
A. V. Tumarkin
Saint Petersburg state electrotechnical university "LETI"
Russian Federation
Russian Federation
S. V. Razumov
Saint Petersburg state electrotechnical university "LETI"
Russian Federation
Russian Federation
A. G. Gagarin
Saint Petersburg state electrotechnical university "LETI"
Russian Federation
Russian Federation
A. M. Cherniavskii
Saint Petersburg state electrotechnical university "LETI"
Russian Federation
Russian Federation
N. A. Yalymov
Saint Petersburg state electrotechnical university "LETI"
Russian Federation
Russian Federation
M. V. Zlygostov
Saint Petersburg state electrotechnical university "LETI"
Russian Federation
Russian Federation
A. A. Poteshkina
Saint Petersburg State Technological Institute (Technical University)
Russian Federation
Russian Federation
Y. A. Uvarenkova
Ferrite Domen Company (Saint Petersburg)
Russian Federation
Russian Federation
V. I. Ivanova
Ferrite Domen Company (Saint Petersburg)
Russian Federation
Russian Federation
References
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Review
For citations:
Tumarkin A.V., Razumov S.V., Gagarin A.G., Cherniavskii A.M., Yalymov N.A., Zlygostov M.V., Poteshkina A.A., Uvarenkova Y.A., Ivanova V.I. The Crystal Structure and Properties of Barium Zirconate Titanate and Barium Stannate Titanate Thin Films for Microwave Applications. Journal of the Russian Universities. Radioelectronics. 2016;(5):61-64. (In Russ.)
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