For citations:
Ivanov A.A., Margolin V.I., Nikiforov A.V., Nguyen V., Petrova G.V., Protchenko A.I., Rassadina A.A., Tupik V.A., Sharova N.N., Sholina I.S., Korbut A.V. X-Ray Lithography for Nanoscale Image Formation. Journal of the Russian Universities. Radioelectronics. 2026;29(3):44-56. (In Russ.) https://doi.org/10.32603/1993-8985-2026-29-3-44-56
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