A Compensator Microelectromechanical Acceleration Transducer with a Piezoelectric Sensing Element and Optical Reading

Introduction. Modern mobile control objects require the use of highly sensitive transducers of motion parameters, e.g., acceleration, with a wide measurement range. Increased sensitivity to measured parameters can be achieved by using precision optics, e.g., based on the tunneling effect. However, operating ranges of induced movements are less than a micrometer, which creates difficulties in positioning the sensing element. In order to improve manufacturability, to extend the measurement range and to reduce errors of acceleration transducers with optical tunneling, compensation circuits with a piezoelectric actuator as an active sensor can be used.

Aim. To extend the measurement range of microelectromechanical acceleration transducers through the use of an integrated approach, including the introduction of a compensation circuit for sensor movements based on the inverse piezoelectric effect and detection of these movements by optical means.

Materials and methods. An approach to compensating sensor movements is proposed. This approach consists in using a bimorph piezoelectric plate as an inertial element. The use of optical reading of sensor sub-micrometer displacements is considered.

Results. A block scheme and a functional scheme of a compensator micro-opto-electromechanical acceleration transducer with a bimorph piezoelectric sensing element are developed. Deformations in the sensing element under the influence of accelerations (up to 100 m/s²) and compensation voltages, whose amplitude does not exceed several volts, are investigated to ensure the possibility of using the optical tunneling effect in the proposed transducer.

Conclusion. A mathematical model of the transducer was developed and studied. A 2.5-fold increase in the  measurement range was achieved. It was shown that the introduction of compensation feedback does not decrease the permissible frequency range of measured accelerations.

1. Niu W., Fang L., Xu L., Li X., Huo R., Guo D., Qi Z. Summary of Research Status and Application of MEMS Accelerometers. J. of Computer and Communications. 2018, vol. 6, iss. 12, pp. 215–221. doi: 10.4236/jcc.2018.612021

2. Xu L., Wang S., Jiang Z., Wei X. Programmable Synchronization Enhanced MEMS Resonant Accelerometer. Microsystems Nanoeng. 2020, iss. 6, art. num. 63. doi: 10.1038/s41378-020-0170-2

3. Babatain W., Bhattacharjee S., Hussain A. M., Hussain M. M. Acceleration Sensors: Sensing Mechanisms, Emerging Fabrication Strategies, Materials, and Applications. ACS Appl. Electron. Mater. 2021, vol. 3, no. 2, pp. 504–531. doi: 10.1021/acsaelm.0c00746

4. Daeichin M., Miles R. N., Towfighian S. LargeStroke Capacitive MEMS Accelerometer without Pullin. IEEE Sensors J. 2021, vol. 21, no. 3, pp. 3097–3106. doi: 10.1109/JSEN.2020.3027270

5. Krasnova S. A., Antipov A. S., Krasnov D. V., Utkin A. V. Cascade Synthesis of Observers of Mixed Variables for Flexible Joint Manipulators Tracking Systems under Parametric and External Disturbances. Electronics. 2023, vol. 12, iss. 8, p. 1930. doi: 10.3390/electronics12081930

6. Kokunko Yu. G., Krasnov D. V., Utkin A. V. Two Methods for Synthesis of State and Disturbance Observers for an Unmanned Aerial Vehicle. Automation and Remote Control. 2021, vol. 82, no. 8, pp. 1426–1441. doi: 10.1134/S0005117921080099

7. Lu Q., Wang Y., Wang X., Yao Y., Wang X., Huang W. Review of Micromachined Optical Accelerometers: From mg to Sub-μg. Opto-Electron. Adv. 2021, vol. 4, no. 3, p. 200045. doi: 10.29026/oea.2021.200045

8. Sundar S., Gopalakrishna K., Thangadurai N. MOEMS-Based Accelerometer Sensor Using Photonic Crystal for Vibration Monitoring in an Automotive System. Int. J. Comput. Aided Eng. Technol. 2021, vol. 14, no. 2. doi: 10.1504/IJCAET.2021.113546

9. Liu X., Liu W., Ren Z., Ma Y., Dong B., Zhou G., Lee C. Progress of Optomechanical Micro/Nano Sensors: a Review. Int. J. Optomechatronics. 2021, vol. 15, no. 1, pp. 120–159. doi: 10.1080/15599612.2021.1986612

10. Zhang Z., Xin C. A Proposal for an Ultracompact Single-Layer MOEMS Accelerometer Based on Evanescent Copling between Parallel Silicon Nanowaveguides. Asia Communications and Photonics Conf. (ACP), Shenzhen, China, 05–08 Nov. 2022. IEEE, 2022, pp. 1998–2001. doi: 10.1109/ACP55869.2022.10088753

11. Busurin V. I., Korobkov K. A., Shleenkin L. A. "Roughly-Accurate" Reading Method for a Acceleration Transducer with an Adaptable Optical Module. Sensors and systems. 2020, no. 8, pp. 27–34. doi: 10.25728/datsys.2020.8.4

12. Busurin V. I., Shtek S. G., Korobkov V. V., Zheglov M. A., Korobkov K. A. Research of Compensation Acceleration Transducer With Differential Optical Reading. Instruments and Systems: Monitoring, Control, and Diagnostics. 2021, no. 3, pp. 29–38. doi: 10.25791/pribor.3.2021.1247

13. Shen J. C., Jywe W. Y., Chiang H. K., Shu Y. L. Precision Tracking Control of a Piezoelectric-Actuated System. Precis. Eng. 2008, vol. 32, iss. 2, pp. 71–78. doi: 10.1016/j.precisioneng.2007.04.002

14. Ballas R. G. Piezoelectric Multilayer Beam Bending Actuators Static and Dynamic Behavior and Aspects of Sensor Integration. Microtechnology and MEMS. Berlin, Springer-Verlag, 2007, 358 p. doi: 10.1007/978-3-540-32642-7

15. El-Sayed A. M., Abo-Ismail A., El-Melegy M. T., Hamzaid N. A., Osman N. A. A. Development of a MicroGripper Using Piezoelectric Bimorphs. Sensors. 2013, vol. 13, iss. 5, pp. 5826–5840. doi: 10.3390/s130505826