The simulation and the optimization of the quality function of the process of the nanoscale film’s growth

V. A. Tupik; T. Su. Chu; I. Steblevska

Journal of the Russian Universities. Radioelectronics
Izvestiya Vysshikh Uchebnykh Zavedenii Rossii. Radioelektronika

ISSN 1993-8985 (Print)
ISSN 2658-4794 (Online)

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Journal of the Russian Universities. Radioelectronics

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Tupik V.A., Chu T.S., Steblevska I. The simulation and the optimization of the quality function of the process of the nanoscale film’s growth. Journal of the Russian Universities. Radioelectronics. 2015;(5):15-19. (In Russ.)

This work is licensed under a Creative Commons Attribution 4.0 License.

ISSN 1993-8985 (Print)
ISSN 2658-4794 (Online)

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Journal of the Russian Universities. Radioelectronics

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