Microfluidic Acoustic Metamaterial SAW Based Sensor
https://doi.org/10.32603/1993-8985-2019-22-4-75-81
Abstract
Introduction. Microacoustic sensors based on surface acoustic wave (SAW) devices allow the sensor integration into a wafer based microfluidic analytical platforms such as lab-on-a-chip. Currently exist various approaches of application of SAW devices for liquid properties analysis. But this sensors probe only a thin interfacial liquid layer. The motivation to develop the new SAW-based sensor is to overcome this limitation. The new sensor introduced here uses acoustic measurements, including surface acoustic waves (SAW) and acoustic methamaterial sensor approaches. The new sensor can become the starting point of a new class of microsensor. It measures volumetric properties of liquid analytes in a cavity, not interfacial properties to some artificial sensor surface as the majority of classical chemical and biochemical sensors.
Objective. The purpose of the work is to find solutions to overcome SAW-based liquid sensors limitations and the developing of a new sensor that uses acoustic measurements and includes a SAW device and acoustic metamaterial.
Materials and methods. A theoretical analysis of sensor structure was carried out on the basis of numerical simulation using COMSOL Multiphysics software. Lithium niobate (LiNbO3) 127.86° Y-cut with wave propagation in the X direction was chosen as a substrate material. Microfluidic structure was designed as a set of rectangular shape channels. A method for measuring volumetric properties of liquids, based on SAW based fluid sensor concept, comprising the steps of: (a) providing sensor structure with the key elements: a SAW resonator, a high-Q set of liquid-filled cavities and intermediate layer with artificial elastic properties between them; (b) measuring of resonance frequency shift, associated with the resonance in liquid-filled cavity, in the response of weakly coupled resonators of SAW resonator loaded by periodic microfluidic structure; (c) determination of volumetric properties of the fluid on the basis of a certain relationship between the speed of sound in liquid, the resonant frequency of the set of liquid-filled cavities, and the geometry design of the cavity.
Results. The new sensor approach is introduced. The eigenmodes of the sensor structure with a liquid analyte are carried out. The characteristic of sensor structure is determined. The key elements of introduced microfluidic sensor are a SAW structure, an acoustic metamaterial with a periodic set of microfluidic channels. The SAW device acts as electromechanical transducer. It excites surface waves propagating in the X direction lengthwise the periodic structure and detects the acoustic load generated by the microfluidic structure resonator. The origin of the sensor signal is a small frequency change caused by small variations of acoustic properties of the analyte within the set of microfluidic channels.
Conclusion. The principle of the new microacoustic sensor, which can become the basis for creating a new class of microfluidic sensors, is shown.
About the Author
Nikolay V. Mukhin
Otto-von-Guericke-University Magdeburg
Germany
Ph.D. (Engineering) (2013), Researcher of Department of Sensorics of Institute of Micro and Sensor Systems (IMOS)
Germany
Ph.D. (Engineering) (2013), Researcher of Department of Sensorics of Institute of Micro and Sensor Systems (IMOS)
References
1. Steinem C., Janshoff A. Piezoelectric sensors. Springer Science & Business Media, 2007, 484 p. doi: 10.1007/b100347
2. Mitsakakis K., Tserepi A., Gizeli E. Integration of microfluidics with a love wave sensor for the fabrication of a multisample analytical microdevice. Journal of microelectromechanical systems. 2008, vol. 17, iss. 4, pp. 1010–1019. doi: 10.1109/JMEMS.2008.927173
3. Kovacs G., Vellekoop M.J., Haueis R., Lubking G. W., Venema A. A Love wave sensor for (bio) chemical sensing in liquids. Sensors and Actuators A: Physical. 1994, vol. 43, pp. 38–43. doi: 10.1016/0924-4247(93)00660-V
4. Barié N., Stahl U., Rapp M. Vacuum-deposited wave-guiding layers on STW resonators based on LiTaO 3 substrate as love wave sensors for chemical and biochemical sensing in liquids. Ultrasonics. 2010, vol. 50, iss. 6, pp. 606–612. doi: 10.1016/j.ultras.2009.12.006
5. Kwan J.K., Sit J.C. Acoustic wave liquid sensors enhanced with glancing angle-deposited thin films. Sensors and Actuators B: Chemical. 2013, vol. 181, pp. 715–719. doi: 10.1016/j.snb.2013.01.068
6. Wohltjen H., Dessy R. Surface acoustic wave probe for chemical analysis. I. Introduction and instrument description. Analytical Chemistry. 1979, vol. 51, no. 9, pp. 1458–1464. https://doi.org/10.1021/ac50045a024
7. Lide D. R. 2001, CRC Handbook of Chemistry and Physics. CRC Press, Boca Raton, Florida, 2000, 2556 p. https://doi.org/10.1021/ja0048230
8. Shiokawa S., Moriizumi T., Design of SAW sensor in liquid, Japanese Journal of Applied Physics. 1988, vol. 27, pp. 142–144. doi: 10.7567/JJAPS.27S1.142
9. Chang H.-W., Shih J.-S. Surface acoustic wave immunosensors based on immobilized C60-proteins. Sensors and Actuators B: Chemical. 2007, 121, iss. 2, pp. 522–529. doi: 10.1016/j.snb.2006.04.078
10. Gizeli E., Goddard N. J., Lowe C. R., Stevenson A. C. A Love plate biosensor utilising a polymer layer, Sensors and Actuators B: Chemical. 1992, vol. 6, iss. 1–3, pp. 131–137. doi: 10.1016/0925-4005(92)80044-X
11. Kushwaha M. S., Halevi P., Dobrzynski L., Djafari-Rouhani B. Acoustic band structure of periodic elastic composites. Phys. Rev. Lett. 1993, vol. 71, iss. 13, 2022. doi: 10.1103/PhysRevLett.71.2022
12. Sigalas M., Economou E. N. Band structure of elastic waves in two dimensional systems, Solid State Commun. 1993, vol. 86, iss. 3, pp. 141–143. doi: 10.1016/0038-1098(93)90888-T
13. Lucklum R., Li J. Phononic crystals for liquid sensor applications. Meas. Sci. Technol. 2009, vol. 20, no. 12, 124014. doi: 10.1088/0957-0233/20/12/124014
14. Lucklum R., Ke M., Zubtsov M. Two-dimensional phononic crystal sensor based on a cavity mode. Sens. Actuators B. 2012, vol. 171, pp. 271–277. doi: 10.1016/j.snb.2012.03.063
15. Lucklum R., Zubtsov M., Oseev A. Phoxonic crystals—a new platform for chemical and biochemical sensors. Anal. Bioanal. Chem. 2013, vol. 405, iss. 20, pp. 6497–6509. doi: 10.1007/s00216-013-7093-9
16. Herrmann F., Jakoby B., Rabe J., Büttgenbach S. Microacoustic sensors for liquid monitoring. Sens. Update. 2001, vol. 9, pp. 105–160. doi: 10.1002/1616-8984(200105)9:13.0.CO;2-I
17. Oseev A., Lucklum R., Ke M., Zubtsov M., Grundmann R. (Eds.), Phononic Crystal Sensor for Liquid Property Determination. International Society for Optics and Photonics, 2012. doi: 10.1117/12.914783
18. Lucklum R., Zubtsov M., M. Ke, Oseev A., Hempel U., Henning B. (Eds.). Determining Liquid Properties by Extraordinary Acoustic TransmissionThrough Phononic Crystals, IEEE, 2012. doi: 10.1109/ICSENS.2011.6126939
19. Oseev A., Zubtsov M., Lucklum R. Octane number determination of gasoline with a phononic crystal sensor. Procedia Eng. 2012, vol. 47, pp. 1382–1385. doi: 10.1016/j.proeng.2012.09.414
20. Oseev A., Zubtsov M., Lucklum R. Gasoline properties determination with phononic crystal cavity sensor. Sens. Actuators B. 2013, vol. 189, pp. 208–212. doi: 10.1016/j.snb.2013.03.072
Review
For citations:
Mukhin N.V. Microfluidic Acoustic Metamaterial SAW Based Sensor. Journal of the Russian Universities. Radioelectronics. 2019;22(4):75-81. https://doi.org/10.32603/1993-8985-2019-22-4-75-81
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