ABOUT TECHNOLOGIES OF X-RAY SYSTEMS FOR CONTROL OF ELECTRONIC COMPONENTS

Introduction. X-ray methods are currently widely used in manufacturing of various products and components of the electronics industry, including micro- and nano-electronics. One of the most informative and illustrative methods is projection X-ray microscopy. Specialized X-ray systems for process control are developed and used in industry. The key element in the design of an X-ray inspection system is an X-ray tube. In the overwhelming majority of cases, X-ray inspection systems are based on collapsible microfocus x-ray tubes with constant pumping. This greatly complicates the design of the installation, increases its dimensions, weight and cost.
Objective. Analysis of possible technical and technological solutions that improve the availability of the X-ray system for monitoring of electronic components while maintaining the information content of the control.
Materials and methods. The article presents the results of analytical studies of assessment of the degree of influence of the main parameters of the X-ray tube – the size of the focal spot and the focal length – on the resolution of the resulting X-ray images. The advantages and disadvantages of two variants of the construction of the X-ray inspection systems are described: based on collapsible and based on sealed X-ray tubes. The dependence of the size of the focal spot on the voltage on the X-ray tube and on the power supplied by the electron beam to the target of the X-ray tube is analyzed. It is shown that sealed (from a vacuum pumping system) micro focus X-ray tubes can be successfully used as a radiation source in installations for X-ray inspection. It is concluded that in most cases, sealed tubes are more practical.
Results. In solving of most problems of non-destructive testing of electronic components in the composition of the Xray system, X-ray sources based on sealed X-ray tubes can be successfully used. Due to this, dimensions, weight, and the cost of an X-ray system for monitoring of electronic components are substantially reduced.
Conclusion. Sealed X-ray tubes are an effective alternative in the development of an X-ray system for monitoring of electronic components, which enables to fundamentally increase the availability of such a system.

1. Pirogova E. V. Proektirovanie i tekhnologiya pechatnykh plat [PCB Design and Technology]. Moscow, Forum Intra-M, 2005, 560 p. (In Russ.)

2. Podymskii A. A., Potrakhov N. N. New Generation Microfocus X-ray Tubes. Testing. Diagnostics. 2017, no. 4, pp. 4–8. (In Russ.)

3. Mazurov A. I., Potrakhov N. N. Possibilities and Limitations of Microfocus X-ray in Medicine. Biotekhnosfera, 2010, no. 4, pp. 20–23. (In Russ.)

4. Bystrov Yu. A., Ivanov S. A. Uskoritel'naya tekhnika i rentgenovskie pribory [Accelerator and X-ray Equipment]. Moscow, Vyssh. shk., 1983, 288 p. (In Russ.)

5. Prakticheskaya rastrovaya elektronnaya mikroskopiya [Practical Scanning Electron Microscopy], ed. by Dzh. Gouldsteina, Yakovitsa. Moscow, Mir, 1978, 656 p. (In Russ.)

6. Potrakhov N. N., Gryaznov A. Yu., Potrakhov E. N. The Effect of a Pseudo-Volumetric Image in Microfocus Radiography. Proc. of Saint Petersburg Electrotechnical University. 2009, no. 2, pp. 18–24. (In Russ.)

7. Gnutov A. YXLON X-ray Installations – See, Not Watch. Proizvodstvo Elektroniki [Electronics Manufacturing]. 2013, no. 5, pp. 1–4. (In Russ.)

8. Bernard D. X-ray tube selection criteria for BGA / CSP X-ray inspection. Proc. of SMTA Int. Conf., Chicago, September 2002. Eden Prairie, MN, USA, SMTA, 2002.

9. Shmakov M. The Choice of X-ray Control System. Technologist's View. Technologies in the Electronics Industry. 2006, no. 4, pp. 60–68. (In Russ.)

10. Shmakov M. The Choice of X-ray Control System. Tech-Nologue View. Technologies in Electronic Industry. 2006, no. 5, pp. 33–40. (In Russ.)

11. Garanin A. Criteria for Choosing an X-Ray Control Unit: Necessary and Sufficient. Printed Circuits Assembly. 2012, no. 5, pp. 170–177. (In Russ.)

12. Podymskii A. A. Powerful X-Ray Tubes for X-Ray Projection: diss. ... Cand. of sci. LETI, SPb., 2016,157 p. (In Russ.)

13. Bessonov V. B., Obodovskii A. V., Klonov V. V., Kostrin D. K. Microfocus Computed Tomography – A New Method of Microminiature Objects Research. Eurasian Union of Scientists. 2014, Vol. 3, pp. 12–15. (In Russ.)

14. Kokoreva I., Shchelkunov G. X-Ray Methods of Non-Destructive Testing. Electronics: Science, Technology, Business. 2017, no. 5, pp. 84–93. (In Russ.)

15. Bakanov G. F., Sokolov S. S., Sukhodol'skii V. Yu. Osnovy konstruirovaniya i tekhnologii radioelektronnykh sredstv [Fundamentals of Design and Technology of Radio Electronic Means], ed by I. G. Mironenko. Moscow, Academia, 2007, 163 p. (In Russ.)

16. Zhou R., Zhou X., Li X., Cai Y., Liu F. Study of the Microfocus X-Ray Tube Based on a Point-Like Target Used for Micro-Computed Tomography. PLoS One. 2016 Jun. 1; 11(6) eCollection 2016. PMID: 27249559. P. 1–12. doi: 10.1371/journal.pone.0156224

17. Lei Zheng, Huarong Liu, Junting Wang. Transmission-type Window of HFCVD Diamond Film for Microfocus X-ray Tube. 4th Int. Conf. on Mechanical Materials and Manufacturing Engineering. Conference Paper. January 2016, pp. 641–644. doi: 10.2991/mmme16.2016.212