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<article article-type="research-article" dtd-version="1.3" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xml:lang="ru"><front><journal-meta><journal-id journal-id-type="publisher-id">radioelectronics</journal-id><journal-title-group><journal-title xml:lang="ru">Известия высших учебных заведений России. Радиоэлектроника</journal-title><trans-title-group xml:lang="en"><trans-title>Journal of the Russian Universities. Radioelectronics</trans-title></trans-title-group></journal-title-group><issn pub-type="ppub">1993-8985</issn><issn pub-type="epub">2658-4794</issn><publisher><publisher-name>Saint Petersburg Electrotechnical University</publisher-name></publisher></journal-meta><article-meta><article-id pub-id-type="doi">10.32603/1993-8985-2022-25-1-47-53</article-id><article-id custom-type="elpub" pub-id-type="custom">radioelectronics-605</article-id><article-categories><subj-group subj-group-type="heading"><subject>Research Article</subject></subj-group><subj-group subj-group-type="section-heading" xml:lang="ru"><subject>МИКРО- И НАНОЭЛЕКТРОНИКА</subject></subj-group><subj-group subj-group-type="section-heading" xml:lang="en"><subject>MICRO- AND NANOELECTRONICS</subject></subj-group></article-categories><title-group><article-title>Особенности применения сорбционного анализа для исследования различных наноматериалов электроники в зависимости от состава и технологических условий получения</article-title><trans-title-group xml:lang="en"><trans-title>Application of Sorption Analysis in the Study of Various Nanomaterials Used in Electronics Depending on their Composition and Production Conditions</trans-title></trans-title-group></title-group><contrib-group><contrib contrib-type="author" corresp="yes"><contrib-id contrib-id-type="orcid">https://orcid.org/0000-0002-1939-253X</contrib-id><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Леньшин</surname><given-names>А. С.</given-names></name><name name-style="western" xml:lang="en"><surname>Lenshin</surname><given-names>A. S.</given-names></name></name-alternatives><bio xml:lang="ru"><p>Леньшин Александр Сергеевич – доктор физико-математических наук (2020), ведущий научный со-трудник кафедры физики твердого тела и теплоэнергетики, доцент кафедры физики теплотехники и тепло-энергетики</p><p>Университетская пл., д. 1, Воронеж, 394018</p></bio><bio xml:lang="en"><p>Alexander S. Lenshin, Dr Sci (Phys. and Math.) (2020), Lead Researcher, Voronezh State University, Associ-ate Professor at the Engineering Technologies Department</p><p>1 Universitetskaya Sq,, Voronezh 394018</p></bio><email xlink:type="simple">lenshinas@mail.ru</email><xref ref-type="aff" rid="aff-1"/></contrib><contrib contrib-type="author" corresp="yes"><contrib-id contrib-id-type="orcid">https://orcid.org/0000-0002-0000-7953</contrib-id><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Мараева</surname><given-names>Е. В.</given-names></name><name name-style="western" xml:lang="en"><surname>Maraeva</surname><given-names>E. V.</given-names></name></name-alternatives><bio xml:lang="ru"><p>Мараева Евгения Владимировна – кандидат физико-математических наук (2014), доцент кафедры микро- и наноэлектроники</p><p>ул. Профессора Попова, д. 5 литера Ф, Санкт-Петербург, 197022</p></bio><bio xml:lang="en"><p>Evgeniya V. Maraeva, Cand. Sci. (Phys. and Math.) (2014), Associate Professor at the Micro- and Nanoelectron-ics Department</p><p>5F Professor Popov St., St Petersburg 197022</p></bio><email xlink:type="simple">jenvmar@mail.ru</email><xref ref-type="aff" rid="aff-2"/></contrib></contrib-group><aff-alternatives id="aff-1"><aff xml:lang="ru"><institution>Воронежский государственный университет</institution><country>Россия</country></aff><aff xml:lang="en"><institution>Voronezh State University</institution><country>Russian Federation</country></aff></aff-alternatives><aff-alternatives id="aff-2"><aff xml:lang="ru"><institution>Санкт-Петербургский государственный электротехнический университет "ЛЭТИ" им. В. И. Ульянова (Ленина)</institution><country>Россия</country></aff><aff xml:lang="en"><institution>Saint Petersburg Electrotechnical University</institution><country>Russian Federation</country></aff></aff-alternatives><pub-date pub-type="collection"><year>2022</year></pub-date><pub-date pub-type="epub"><day>22</day><month>02</month><year>2022</year></pub-date><volume>25</volume><issue>1</issue><fpage>47</fpage><lpage>53</lpage><permissions><copyright-statement>Copyright &amp;#x00A9; Леньшин А.С., Мараева Е.В., 2022</copyright-statement><copyright-year>2022</copyright-year><copyright-holder xml:lang="ru">Леньшин А.С., Мараева Е.В.</copyright-holder><copyright-holder xml:lang="en">Lenshin A.S., Maraeva E.V.</copyright-holder><license xml:lang="ru" license-type="creative-commons-attribution" xlink:href="https://creativecommons.org/licenses/by/4.0/" xlink:type="simple"><license-p>Данная работа распространяется под лицензией Creative Commons Attribution 4.0.</license-p></license><license xml:lang="en" license-type="creative-commons-attribution" xlink:href="https://creativecommons.org/licenses/by/4.0/" xlink:type="simple"><license-p>This work is licensed under a Creative Commons Attribution 4.0 License.</license-p></license></permissions><self-uri xlink:href="https://re.eltech.ru/jour/article/view/605">https://re.eltech.ru/jour/article/view/605</self-uri><abstract><p>Введение. В настоящее время сорбционные методы анализа, включая метод тепловой десорбции инертных газов, широко применяются для характеризации параметров пористой структуры наноматериалов широкого спектра функционального назначения. Тепловая десорбция азота относится к группе неразрушающих методик, обеспечивающих экспресс-анализ таких параметров наноматериалов, как удельная поверхность, средний размер частиц, распределение мезопор по размерам, наличие или отсутствие микропор в системе. В данной статье в качестве объектов исследования выбраны порошки мезопористого кремния и гидроксиапатита кальция. Наноструктуры на основе мезо- и нанопористого кремния представляют интерес при реализации фильтров для систем волоконнооптической связи, поскольку современные интерференционные оптические фильтры громоздки в использовании и дороги. Гидроксиапатит потенциально обеспечивает высокую коррозионную стойкость и не токсичен для окружающей среды. Антикоррозионные покрытия на его основе имеют решающее значение для практического применения магниевых сплавов, которые используются для уменьшения массы транспортных средств, самолетов, корпусов электроники.Цель работы. Рассмотрение особенностей применения метода тепловой десорбции инертных газов, в частности азота, для исследования параметров пористой структуры наноматериалов различного состава на примере мезопористого кремния и гидроксиапатита.Материалы и методы. Применение метода тепловой десорбции инертных газов и капиллярной конденсации для исследования параметров пористой структуры порошков гидроксиапатита и пористого кремния. Метод тепловой десорбции азота реализован с помощью прибора Сорби МС, оснащенного станцией пробоподготовки Сорби Преп.Результаты. Предложены рекомендации по выбору массы материала-адсорбента, требуемой для исследования, выбору условий пробоподготовки и диапазона изменения относительного парциального давления газаадсорбата. Установлено, что выбранные типы образцов характеризуются отсутствием системы микропор в структуре. Проанализирована зависимость удельной поверхности порошков гидроксиапатита и параметров его мезопористой структуры от условий термообработки.Заключение. Исследование процессов адсорбции и капиллярной конденсации азота позволяет воспроизводить параметры пористой структуры гидроксиапатита и пористого кремния, что является важным показателем для их применения в медицине и электронике в качестве антикоррозионных покрытий и для реализации оптических фильтров.</p></abstract><trans-abstract xml:lang="en"><p>Introduction. At present, sorption methods of analysis, including the thermal desorption of inert gases, are widely adopted to characterize the porous structure parameters of nanomaterials having a wide range of applications. Nitrogen thermal desorption belongs to the group of nondestructive techniques that provide a rapid analysis of the following parameters exhibited by nanomaterials: specific surface area, average particle size, mesopore size distribution, as well as the presence or absence of micropores in the system. In this work, mesoporous silicon and calcium hydroxyapatite powders are selected as the objects of research. Since modern interference optical filters are cumbersome and expensive to use, meso- and nanoporous silicon nanostructures are of interest in the implementation of filters for fiberoptic communication systems. Hydroxyapatite can potentially provide high corrosion resistance while posing no risk of toxicity to the environment. In addition, anticorrosion hydroxyapatite coatings are of decisive importance for the practical application of magnesium alloys used to reduce the weight of vehicles, aircraft, and electronics housings.Aim. To consider the application of the thermal desorption of inert gases, specifically nitrogen thermal desorption, in the study of the porous structure parameters of nanomaterials having various compositions on the example of mesoporous silicon and hydroxyapatite.Materials and methods. In this work, the thermal desorption of inert gases and capillary condensation were applied to study the porous structure parameters of hydroxyapatite and porous silicon powders. In particular, the nitrogen thermal desorption method was implemented using a Sorbi MS instrument equipped with a Sorbi Prep sample preparation station.Results. Recommendations are provided on choosing the mass of the adsorbent material required for the study, the sample preparation conditions, as well as the relative partial pressure range of the gas adsorbate. The selected sample types were found to lack a micropore system in the structure. Finally, the dependence of the specific surface area of hydroxyapatite powders and the parameters of its mesoporous structure on heat treatment conditions was analyzed.Conclusion. The study of nitrogen adsorption and capillary condensation allows the porous structure parameters of hydroxyapatite and porous silicon to be reproduced, which is of great importance for their use in medicine and radio electronics as anticorrosion coatings, as well as for the implementation of optical filters.</p></trans-abstract><kwd-group xml:lang="ru"><kwd>дельная поверхность</kwd><kwd>пористые материалы</kwd><kwd>сорбционный анализ</kwd><kwd>пористый кремний</kwd><kwd>гидроксиапатит</kwd></kwd-group><kwd-group xml:lang="en"><kwd>specific surface area</kwd><kwd>porous materials</kwd><kwd>sorption analysis</kwd><kwd>porous silicon</kwd><kwd>hydroxyapatite</kwd></kwd-group><funding-group><funding-statement xml:lang="ru">Работа частично выполнена при финансовой поддержке гранта РНФ № 19-72-10007 и в рамках государственного задания Минобрнауки России № FZGU-2020-0036, реализуемых в Воронежском государственном университете.</funding-statement><funding-statement xml:lang="en">The work was partially supported by a grant of Russian Science Foundation No. 19-72-10007 and a state task of Ministry of Science and Higher Education of the Russian Federation No. FZGU-2020-0036.</funding-statement></funding-group></article-meta></front><back><ref-list><title>References</title><ref id="cit1"><label>1</label><citation-alternatives><mixed-citation xml:lang="ru">Магнитные и плазмонные композиционные наноструктуры для реализации оптических филь-тров в системах контроля и диагностики веществ и материалов / Р. 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