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<article article-type="research-article" dtd-version="1.3" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xml:lang="ru"><front><journal-meta><journal-id journal-id-type="publisher-id">radioelectronics</journal-id><journal-title-group><journal-title xml:lang="ru">Известия высших учебных заведений России. Радиоэлектроника</journal-title><trans-title-group xml:lang="en"><trans-title>Journal of the Russian Universities. Radioelectronics</trans-title></trans-title-group></journal-title-group><issn pub-type="ppub">1993-8985</issn><issn pub-type="epub">2658-4794</issn><publisher><publisher-name>Saint Petersburg Electrotechnical University</publisher-name></publisher></journal-meta><article-meta><article-id pub-id-type="doi">10.32603/1993-8985-2020-23-5-57-62</article-id><article-id custom-type="elpub" pub-id-type="custom">radioelectronics-468</article-id><article-categories><subj-group subj-group-type="heading"><subject>Research Article</subject></subj-group><subj-group subj-group-type="section-heading" xml:lang="ru"><subject>КВАНТОВАЯ, ТВЕРДОТЕЛЬНАЯ, ПЛАЗМЕННАЯ И ВАКУУМНАЯ ЭЛЕКТРОНИКА</subject></subj-group><subj-group subj-group-type="section-heading" xml:lang="en"><subject>QUANTUM, SOLID-STATE, PLASMA AND VACUUM ELECTRONICS</subject></subj-group></article-categories><title-group><article-title>Optimization and Fabrication of Heterojunction Silicon Solar Cells Using an Experimental-Industrial Facility AK-1000 Inline</article-title><trans-title-group xml:lang="en"><trans-title>Optimization and Fabrication of Heterojunction Silicon Solar Cells Using an Experimental-Industrial Facility AK-1000 Inline</trans-title></trans-title-group></title-group><contrib-group><contrib contrib-type="author" corresp="yes"><contrib-id contrib-id-type="orcid">https://orcid.org/0000-0003-4417-4996</contrib-id><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Chuchvaga</surname><given-names>N. А.</given-names></name><name name-style="western" xml:lang="en"><surname>Chuchvaga</surname><given-names>N. A.</given-names></name></name-alternatives><bio xml:lang="ru"><p>Nikolay A. Chuchvaga, PhD (2019), Senior Researcher; Senior lecturer at al-Farabi Kazakh National University and the Kazakh-German University. From 2010 to 2014, he was an employee, and also wrote bachelor's and master's theses at the P.I. Ioffe RAS. He completed his PhD thesis at the P.I. Ioffe RAS (Russia) and IPT LLP (Kazakhstan). 11 Ibragimov St., 050032, Almaty, Kazakhstan</p></bio><bio xml:lang="en"><p>Nikolay A. Chuchvaga, PhD (2019), Senior Researcher; Senior lecturer at al-Farabi Kazakh National University and the Kazakh-German University. From 2010 to 2014, he was an employee, and also wrote bachelor's and master's theses at the P.I. Ioffe RAS. He completed his PhD thesis at the P.I. Ioffe RAS (Russia) and IPT LLP (Kazakhstan). 11 Ibragimov St., 050032, Almaty, Kazakhstan</p></bio><email xlink:type="simple">nikolay.chuchvaga@gmail.com</email><xref ref-type="aff" rid="aff-1"/></contrib><contrib contrib-type="author" corresp="yes"><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Schulze</surname><given-names>J.</given-names></name><name name-style="western" xml:lang="en"><surname>Schulze</surname><given-names>J.</given-names></name></name-alternatives><bio xml:lang="ru"><p>Julius Schulze, Master of science, Technologist, An der Baumschule 6-8, 09337 Hohenstein-Ernstthal, Germany</p></bio><bio xml:lang="en"><p>Julius Schulze, Master of science, Technologist, Meyer Burger, An der Baumschule 6-8, 09337 Hohenstein-Ernstthal, Germany</p></bio><email xlink:type="simple">julius.schulze@meyerburger.com</email><xref ref-type="aff" rid="aff-2"/></contrib><contrib contrib-type="author" corresp="yes"><contrib-id contrib-id-type="orcid">https://orcid.org/0000-0001-6836-3033</contrib-id><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Klimenov</surname><given-names>V. V.</given-names></name><name name-style="western" xml:lang="en"><surname>Klimenov</surname><given-names>V. V.</given-names></name></name-alternatives><bio xml:lang="ru"><p>Vassiliy V. Klimenov, Chief Technologist, postgraduate studies - "Solid State and Condensed Matter Physics" Physics and Technology Institute 2006-2009, 11 Ibragimov St., 050032, Almaty, Kazakhstan</p></bio><bio xml:lang="en"><p>Vassiliy V. Klimenov, Chief Technologist, Postgraduate studies - "Solid State and Condensed Matter Physics" Physics and Technology Institute 2006-2009, 11 Ibragimov St., 050032, Almaty, Kazakhstan</p></bio><email xlink:type="simple">vasyly_vasyly@rambler.ru</email><xref ref-type="aff" rid="aff-3"/></contrib><contrib contrib-type="author" corresp="yes"><contrib-id contrib-id-type="orcid">https://orcid.org/0000-0002-0208-9104</contrib-id><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Zholdybayev</surname><given-names>К. S.</given-names></name><name name-style="western" xml:lang="en"><surname>Zholdybayev</surname><given-names>K. S.</given-names></name></name-alternatives><bio xml:lang="ru"><p>Kairat S. Zholdybayev, Junior Researcher. Education: Master (Kazakh National University named after Al-Farabi, 2016, specialty - Nuclear Physic). After graduating from the master degree in 2016, he is engaged in research in the field of research of heterojunction silicon and perovskite solar cells at the Laboratory of Photoelectric Phenomena and Devices (LPNP). On this topic, he is preparing a thesis for the degree of Doctor of Philosophy PhD. 11 Ibragimov St., 050032, Almaty, Kazakhstan</p></bio><bio xml:lang="en"><p>Kairat S. Zholdybayev, Junior Researcher. Education: Master (Kazakh National University named after Al-Farabi, 2016, specialty - Nuclear Physic). After graduating from the master degree in 2016, he is engaged in research in the field of research of heterojunction silicon and perovskite solar cells at the Laboratory of Photoelectric Phenomena and Devices (LPNP). On this topic, he is preparing a thesis for the degree of Doctor of Philosophy PhD. 11 Ibragimov St., 050032, Almaty, Kazakhstan</p></bio><email xlink:type="simple">gaisin0510@gmail.ru</email><xref ref-type="aff" rid="aff-4"/></contrib><contrib contrib-type="author" corresp="yes"><contrib-id contrib-id-type="orcid">https://orcid.org/0000-0001-6367-9135</contrib-id><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Aimaganbetov</surname><given-names>К. P.</given-names></name><name name-style="western" xml:lang="en"><surname>Aimaganbetov</surname><given-names>K. P.</given-names></name></name-alternatives><bio xml:lang="ru"><p>Kazybek P. Aimaganbetov, Researcher. Master 2017 (Technical Physics, KazNRTU named after Satpayev). At the moment he is studying under the PhD program. 11 Ibragimov St., 050032, Almaty, Kazakhstan</p></bio><bio xml:lang="en"><p>Kazybek P. Aimaganbetov, Researcher, Master 2017 (Technical Physics, KazNRTU named after Satpayev). At the moment he is studying under the PhD program. 11 Ibragimov St., 050032, Almaty, Kazakhstan</p></bio><email xlink:type="simple">a.k_012@mail.ru</email><xref ref-type="aff" rid="aff-1"/></contrib><contrib contrib-type="author" corresp="yes"><contrib-id contrib-id-type="orcid">https://orcid.org/0000-0002-2467-0178</contrib-id><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Zhantuarov</surname><given-names>S. R.</given-names></name><name name-style="western" xml:lang="en"><surname>Zhantuarov</surname><given-names>S. R.</given-names></name></name-alternatives><bio xml:lang="ru"><p>Sultan R. Zhantuarov, Junior Researcher. Education: Master (National Research Tomsk Polytechnic University, 2014, specialty - 011200, «Physics»). After graduating from master’s degree in 2014, he is engaged in research in the field of research of perovskite solar cells at the Laboratory of Photoelectric Phenomena and Devices. On this topic, he is preparing a PhD thesis. 11 Ibragimov St., 050032, Almaty, Kazakhstan</p></bio><bio xml:lang="en"><p>Sultan R. Zhantuarov, Junior Researcher. Education: Master (National Research Tomsk Polytechnic University, 2014, specialty - 011200, «Physics»). After graduating from master’s degree in 2014, he is engaged in research in the field of research of perovskite solar cells at the Laboratory of Photoelectric Phenomena and Devices. On this topic, he is preparing a PhD thesis. 11 Ibragimov St., 050032, Almaty, Kazakhstan</p></bio><email xlink:type="simple">sultzhantuarov@mail.ru</email><xref ref-type="aff" rid="aff-4"/></contrib><contrib contrib-type="author" corresp="yes"><contrib-id contrib-id-type="orcid">https://orcid.org/0000-0001-6817-9586</contrib-id><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Serikkanov</surname><given-names>А. S.</given-names></name><name name-style="western" xml:lang="en"><surname>Serikkanov</surname><given-names>A. S.</given-names></name></name-alternatives><bio xml:lang="ru"><p>Abay S. Serikkanov, Director of FTI LLP. Candidate of Physical and Mathematical Sciences, Chief Researcher, 11 Ibragimov St., 050032, Almaty, Kazakhstan</p></bio><bio xml:lang="en"><p>Abay S. Serikkanov, Director of FTI LLP. Candidate of Physical and Mathematical Sciences, Chief Researcher, 11 Ibragimov St., 050032, Almaty, Kazakhstan</p></bio><email xlink:type="simple">a.serikkanov@gmail.com</email><xref ref-type="aff" rid="aff-4"/></contrib><contrib contrib-type="author" corresp="yes"><contrib-id contrib-id-type="orcid">https://orcid.org/0000-0002-4818-4924</contrib-id><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Terukov</surname><given-names>E. I.</given-names></name><name name-style="western" xml:lang="en"><surname>Terukov</surname><given-names>E. I.</given-names></name></name-alternatives><bio xml:lang="ru"><p>Eugeny I. Terukov, Dr. Sci. (Eng.) in Technical Sciences in the specialty of "Semiconductors and Dielectrics" (1996), Professor, Head of laboratory, 26 Polytechnicheskaya St., 194021, St Petersburg, Russia</p></bio><bio xml:lang="en"><p>Eugeny I. Terukov, Dr. Sci. (Eng.) in Technical Sciences in the specialty of "Semiconductors and Dielectrics" (1996), Professor, Head of laboratory, 26 Polytechnicheskaya St., 194021, St Petersburg, Russia</p></bio><email xlink:type="simple">eug.terukov@mail.ioffe.ru</email><xref ref-type="aff" rid="aff-5"/></contrib><contrib contrib-type="author" corresp="yes"><contrib-id contrib-id-type="orcid">https://orcid.org/0000-0003-0633-4733</contrib-id><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Tokmoldin</surname><given-names>S. Zh.</given-names></name><name name-style="western" xml:lang="en"><surname>Tokmoldin</surname><given-names>S. Zh.</given-names></name></name-alternatives><bio xml:lang="ru"><p>Serekbol Zh. Tokmoldin, Dr. Sci. (Physics and Mathematics), Chief Researcher, Director of Silica Metals LLP and RDC SiTech LLP, 312 Raiymbek Ave., 050005, Almaty, Kazakhstan</p></bio><bio xml:lang="en"><p>Serekbol Zh. Tokmoldin, Dr. Sci. (Physics and Mathematics), Chief Researcher of the Research and Production Center of Agroengineering LLP; Director of Silica Metals LLP and RDC SiTech LLP, 312 Raiymbek Ave., 050005, Almaty, Kazakhstan</p></bio><email xlink:type="simple">stokmoldin@mail.ru</email><xref ref-type="aff" rid="aff-6"/></contrib><contrib contrib-type="author" corresp="yes"><contrib-id contrib-id-type="orcid">https://orcid.org/0000-0002-0663-0228</contrib-id><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Tokmoldin</surname><given-names>N. S.</given-names></name><name name-style="western" xml:lang="en"><surname>Tokmoldin</surname><given-names>N. S.</given-names></name></name-alternatives><bio xml:lang="ru"><p>Nurlan S. Tokmoldin, PhD in Organic Electronics (2011), at the time of preparing the manuscript Head of Laboratory of Photovoltaic Phenomena and Devices. Currently, post-doctoral researcher at the University of Potsdam, Germany. 11 Ibragimov St., 050032, Almaty, Kazakhstan</p></bio><bio xml:lang="en"><p>Nurlan S. Tokmoldin, PhD in Organic Electronics (2011), at the time of preparing the manuscript Head of Laboratory of Photovoltaic Phenomena and Devices; сurrently, post-doctoral researcher at the University of Potsdam (Germany); 11 Ibragimov St., 050032, Almaty, Kazakhstan</p></bio><email xlink:type="simple">ntokmoldin@gmail.com</email><xref ref-type="aff" rid="aff-7"/></contrib></contrib-group><aff-alternatives id="aff-1"><aff xml:lang="ru"><institution>Satbayev University, Institute of Physics and Technology, LLP; Scientific-Production Center of Agricultural Engineering, LLP</institution><country>Казахстан</country></aff><aff xml:lang="en"><institution>Satbayev University, Institute of Physics and Technology, LLP; Scientific-Production Center of Agricultural Engineering, LLP</institution><country>Kazakhstan</country></aff></aff-alternatives><aff-alternatives id="aff-2"><aff xml:lang="ru"><institution>Meyer Burger (Germany) AG</institution><country>Германия</country></aff><aff xml:lang="en"><institution>Meyer Burger (Germany) AG</institution><country>Germany</country></aff></aff-alternatives><aff-alternatives id="aff-3"><aff xml:lang="ru"><institution>Satbayev University, Institute of Physics and Technology, LLP; Scientific-Production Center of Agricultural Engineering, LLP; RDC SiTech, LLP</institution><country>Казахстан</country></aff><aff xml:lang="en"><institution>Satbayev University, Institute of Physics and Technology, LLP; Scientific-Production Center of Agricultural Engineering, LLP; RDC SiTech, LLP</institution><country>Kazakhstan</country></aff></aff-alternatives><aff-alternatives id="aff-4"><aff xml:lang="ru"><institution>Satbayev University, Institute of Physics and Technology, LLP</institution><country>Казахстан</country></aff><aff xml:lang="en"><institution>Satbayev University, Institute of Physics and Technology, LLP</institution><country>Kazakhstan</country></aff></aff-alternatives><aff-alternatives id="aff-5"><aff xml:lang="ru"><institution>A.F. Ioffe Physical-Technical Institute; R&amp;D Center for Thin-Film Technologies in Energetics at A.F. Ioffe Physical-Technical Institute</institution><country>Россия</country></aff><aff xml:lang="en"><institution>A.F. Ioffe Physical-Technical Institute; R&amp;D Center for Thin-Film Technologies in Energetics at A.F. Ioffe Physical-Technical Institute</institution><country>Russian Federation</country></aff></aff-alternatives><aff-alternatives id="aff-6"><aff xml:lang="ru"><institution>Scientific-Production Center of Agricultural Engineering, LLP; RDC SiTech, LLP</institution><country>Казахстан</country></aff><aff xml:lang="en"><institution>Scientific-Production Center of Agricultural Engineering, LLP; RDC SiTech, LLP</institution><country>Kazakhstan</country></aff></aff-alternatives><aff-alternatives id="aff-7"><aff xml:lang="ru"><institution>Satbayev University, Institute of Physics and Technology, LLP; University of Potsdam</institution><country>Казахстан</country></aff><aff xml:lang="en"><institution>Satbayev University, Institute of Physics and Technology, LLP; University of Potsdam</institution><country>Kazakhstan</country></aff></aff-alternatives><pub-date pub-type="collection"><year>2020</year></pub-date><pub-date pub-type="epub"><day>24</day><month>11</month><year>2020</year></pub-date><volume>23</volume><issue>5</issue><fpage>57</fpage><lpage>62</lpage><permissions><copyright-statement>Copyright &amp;#x00A9; Chuchvaga N.А., Schulze J., Klimenov V.V., Zholdybayev К.S., Aimaganbetov К.P., Zhantuarov S.R., Serikkanov А.S., Terukov E.I., Tokmoldin S.Z., Tokmoldin N.S., 2020</copyright-statement><copyright-year>2020</copyright-year><copyright-holder xml:lang="ru">Chuchvaga N.А., Schulze J., Klimenov V.V., Zholdybayev К.S., Aimaganbetov К.P., Zhantuarov S.R., Serikkanov А.S., Terukov E.I., Tokmoldin S.Z., Tokmoldin N.S.</copyright-holder><copyright-holder xml:lang="en">Chuchvaga N.A., Schulze J., Klimenov V.V., Zholdybayev K.S., Aimaganbetov K.P., Zhantuarov S.R., Serikkanov A.S., Terukov E.I., Tokmoldin S.Z., Tokmoldin N.S.</copyright-holder><license xml:lang="ru" license-type="creative-commons-attribution" xlink:href="https://creativecommons.org/licenses/by/4.0/" xlink:type="simple"><license-p>Данная работа распространяется под лицензией Creative Commons Attribution 4.0.</license-p></license><license xml:lang="en" license-type="creative-commons-attribution" xlink:href="https://creativecommons.org/licenses/by/4.0/" xlink:type="simple"><license-p>This work is licensed under a Creative Commons Attribution 4.0 License.</license-p></license></permissions><self-uri xlink:href="https://re.eltech.ru/jour/article/view/468">https://re.eltech.ru/jour/article/view/468</self-uri><abstract><sec><title>Introduction</title><p>Introduction. Heterojunction silicon solar cells represent one of the most promising directions for the development of solar photovoltaics. This is due to both their high power conversion efficiency and reasonable likelihood for further growth in performance, as well as good commercial potential of this technology, which relies on a transition from conventional diffusion-based processes to thin film deposition.</p></sec><sec><title>Aim</title><p>Aim. The paper describes results of optimization and fabrication of heterojunction silicon solar cells using the AK-1000 inline tool, adapted for processing of 6-inch wafers.</p></sec><sec><title>Materials and methods</title><p>Materials and methods. In the manufacturing of solar cells, crystalline silicon wafers were subjected to wet chemical processes, and then electron, hole, and intrinsic types of conductivity of the layers based on amorphous silicon were deposited by plasma-chemical deposition. Precipitation of oxide transparent conductive layers was carried out by magnetron sputtering. To optimize the processes of obtaining solar cells, measurements of the reflection coefficient, of lifetime of minority carriers, and of current – voltage characteristics were used.</p></sec><sec><title>Results</title><p>Results. As a result of the work, heterojunction solar cells were obtained in a laboratory in Kazakhstan with an efficiency of 20% without using of traditional diffusion processes for solar cells manufacturing.</p></sec><sec><title>Conclusions</title><p>Conclusions. The output parameters associated with light conversion efficiency demonstrate the possibility of further optimization of the parameters affecting the performance of heterojunction solar cells.</p></sec></abstract><trans-abstract xml:lang="en"><sec><title>Introduction</title><p>Introduction. Heterojunction silicon solar cells represent one of the most promising directions for the development of solar photovoltaics. This is due to both their high power conversion efficiency and reasonable likelihood for further growth in performance, as well as good commercial potential of this technology, which relies on a transition from conventional diffusion-based processes to thin film deposition.</p></sec><sec><title>Aim</title><p>Aim. The paper describes results of optimization and fabrication of heterojunction silicon solar cells using the AK-1000 inline tool, adapted for processing of 6-inch wafers.</p></sec><sec><title>Materials and methods</title><p>Materials and methods. In the manufacturing of solar cells, crystalline silicon wafers were subjected to wet chemical processes, and then electron, hole, and intrinsic types of conductivity of the layers based on amorphous silicon were deposited by plasma-chemical deposition. Precipitation of oxide transparent conductive layers was carried out by magnetron sputtering. To optimize the processes of obtaining solar cells, measurements of the reflection coefficient, of lifetime of minority carriers, and of current – voltage characteristics were used.</p></sec><sec><title>Results</title><p>Results. As a result of the work, heterojunction solar cells were obtained in a laboratory in Kazakhstan with an efficiency of 20% without using of traditional diffusion processes for solar cells manufacturing.</p></sec><sec><title>Conclusions</title><p>Conclusions. The output parameters associated with light conversion efficiency demonstrate the possibility of further optimization of the parameters affecting the performance of heterojunction solar cells.</p></sec></trans-abstract><kwd-group xml:lang="ru"><kwd>heterojunction</kwd><kwd>silicon</kwd><kwd>solar cell</kwd><kwd>power conversion efficiency</kwd></kwd-group><kwd-group xml:lang="en"><kwd>heterojunction</kwd><kwd>silicon</kwd><kwd>solar cell</kwd><kwd>power conversion efficiency</kwd></kwd-group><funding-group><funding-statement xml:lang="ru">The authors acknowledge the funding support of the Ministry of Education of Science of the Republic of Kazakhstan within projects AP05133645, BR05236498, 0355-18-GK, AP05133651. The solar cell fabrication facility was built in the framework of the purpose-funding program O.0652.</funding-statement><funding-statement xml:lang="en">The authors acknowledge the funding support of the Ministry of Education of Science of the Republic of Kazakhstan within projects AP05133645, BR05236498, 0355-18-GK, AP05133651. The solar cell fabrication facility was built in the framework of the purpose-funding program O.0652.</funding-statement></funding-group></article-meta></front><back><ref-list><title>References</title><ref id="cit1"><label>1</label><citation-alternatives><mixed-citation xml:lang="ru">Battaglia C., Cuevas A., De Wolf S. High-efficiency crystalline silicon solar cells: status and perspectives. Energy Environ. Sci. 2016, vol. 9, iss. 5, pp. 1552-76. doi: 10.1039/C5EE03380B</mixed-citation><mixed-citation xml:lang="en">Battaglia C., Cuevas A., De Wolf S. High-efficiency crystalline silicon solar cells: status and perspectives. Energy Environ. 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