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<article article-type="research-article" dtd-version="1.3" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xml:lang="ru"><front><journal-meta><journal-id journal-id-type="publisher-id">radioelectronics</journal-id><journal-title-group><journal-title xml:lang="ru">Известия высших учебных заведений России. Радиоэлектроника</journal-title><trans-title-group xml:lang="en"><trans-title>Journal of the Russian Universities. Radioelectronics</trans-title></trans-title-group></journal-title-group><issn pub-type="ppub">1993-8985</issn><issn pub-type="epub">2658-4794</issn><publisher><publisher-name>Saint Petersburg Electrotechnical University</publisher-name></publisher></journal-meta><article-meta><article-id pub-id-type="doi">10.32603/1993-8985-2020-23-4-38-47</article-id><article-id custom-type="elpub" pub-id-type="custom">radioelectronics-452</article-id><article-categories><subj-group subj-group-type="heading"><subject>Research Article</subject></subj-group><subj-group subj-group-type="section-heading" xml:lang="ru"><subject>КВАНТОВАЯ, ТВЕРДОТЕЛЬНАЯ, ПЛАЗМЕННАЯ И ВАКУУМНАЯ ЭЛЕКТРОНИКА</subject></subj-group><subj-group subj-group-type="section-heading" xml:lang="en"><subject>QUANTUM, SOLID-STATE, PLASMA AND VACUUM ELECTRONICS</subject></subj-group></article-categories><title-group><article-title>Plasma Enhanced Chemical Vapor Deposited Materials and Organic Semiconductors in Photovoltaic Devices</article-title><trans-title-group xml:lang="en"><trans-title>Plasma Enhanced Chemical Vapor Deposited Materials and Organic Semiconductors in Photovoltaic Devices</trans-title></trans-title-group></title-group><contrib-group><contrib contrib-type="author" corresp="yes"><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Kosarev</surname><given-names>А.</given-names></name><name name-style="western" xml:lang="en"><surname>Kosarev</surname><given-names>A.</given-names></name></name-alternatives><bio xml:lang="ru"><p>Andrey Kosarev, Cand. Sci. (Eng.) in Physics and Mathematics in the specialty of "Semiconductors and Dielectrics" (1978), Professor Researcher at National Institute for Astrophysics, Optics and Electronics Dept., Puebla, 42840, Mexico</p></bio><bio xml:lang="en"><p>Andrey Kosarev, Cand. Sci. (Eng.) in Physics and Mathematics in the specialty of "Semiconductors and Dielectrics" (1978), Professor Researcher at National Institute for Astrophysics, Optics and Electronics Dept., Puebla, 42840, Mexico</p></bio><email xlink:type="simple">andrey-1409@mail.ru</email><xref ref-type="aff" rid="aff-1"/></contrib><contrib contrib-type="author" corresp="yes"><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Cosme</surname><given-names>I.</given-names></name><name name-style="western" xml:lang="en"><surname>Cosme</surname><given-names>I.</given-names></name></name-alternatives><bio xml:lang="ru"><p>Ismael Cosme, PhD from INAOE in 2013, Associated researcher, Optics and Electronics Dept., Puebla, 42840, Mexico</p></bio><bio xml:lang="en"><p>Ismael Cosme, PhD from INAOE in 2013, Associated researcher, Optics and Electronics Dept., Puebla, 42840, Mexico</p></bio><email xlink:type="simple">ismaelcb@inaoep.mx</email><xref ref-type="aff" rid="aff-2"/></contrib><contrib contrib-type="author" corresp="yes"><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Mansurova</surname><given-names>S.</given-names></name><name name-style="western" xml:lang="en"><surname>Mansurova</surname><given-names>S.</given-names></name></name-alternatives><bio xml:lang="ru"><p>Svetlana Mansurova, PhD from National Institute for Astrophysics, Optics and Electronics (Mexico) in 1998. Titular Researcher, Optics and Electronics Dept., Puebla, 42840, Mexico</p></bio><bio xml:lang="en"><p>Svetlana Mansurova, PhD from National Institute for Astrophysics, Optics and Electronics (Mexico) in 1998. Titular Researcher, Optics and Electronics Dept., Puebla, 42840, Mexico</p></bio><email xlink:type="simple">smansurova@inaoep.mx</email><xref ref-type="aff" rid="aff-1"/></contrib><contrib contrib-type="author" corresp="yes"><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Andronikov</surname><given-names>D.</given-names></name><name name-style="western" xml:lang="en"><surname>Andronikov</surname><given-names>D.</given-names></name></name-alternatives><bio xml:lang="ru"><p>Dmitriy Andronikov, Cand. Sci. (Eng.) in Physics and Mathematics in the specialty of "Semiconductors and Dielectrics" (2013), 28 Polytechnicheskaya St., 194064, St Petersburg, Russia</p></bio><bio xml:lang="en"><p>Dmitriy Andronikov, Cand. Sci. (Eng.) in Physics and Mathematics in the specialty of "Semiconductors and Dielectrics" (2013), 28 Polytechnicheskaya St., 194064, St Petersburg, Russia</p></bio><email xlink:type="simple">d.andronikov@hevelsolar.com</email><xref ref-type="aff" rid="aff-3"/></contrib><contrib contrib-type="author" corresp="yes"><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Abramov</surname><given-names>А.</given-names></name><name name-style="western" xml:lang="en"><surname>Abramov</surname><given-names>A.</given-names></name></name-alternatives><bio xml:lang="ru"><p>Alexey Abramov, Cand. Sci. (Eng.) in Physics and Mathematics in the specialty of "Semiconductors and Dielec-trics» (2001), 28 Polytechnicheskaya St., 194064, St Petersburg, Russia</p></bio><bio xml:lang="en"><p>Alexey Abramov, Cand. Sci. (Eng.) in Physics and Mathematics in the specialty of "Semiconductors and Dielec-trics» (2001), 28 Polytechnicheskaya St., 194064, St Petersburg, Russia</p></bio><email xlink:type="simple">a.abramov@hevelsolar.com</email><xref ref-type="aff" rid="aff-3"/></contrib><contrib contrib-type="author" corresp="yes"><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Shakhray</surname><given-names>I.</given-names></name><name name-style="western" xml:lang="en"><surname>Shakhray</surname><given-names>I.</given-names></name></name-alternatives><bio xml:lang="ru"><p>Igor Shakhray, CEO from Hevel LLC, Doctorant, 429950, Novocheboksarsk, Russia</p></bio><bio xml:lang="en"><p>Igor Shakhray, CEO from Hevel LLC, Doctorant, 429950, Novocheboksarsk, Russia</p></bio><email xlink:type="simple">i.shakhray@hevelsolar.com</email><xref ref-type="aff" rid="aff-4"/></contrib><contrib contrib-type="author" corresp="yes"><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Terukov</surname><given-names>Eu.</given-names></name><name name-style="western" xml:lang="en"><surname>Terukov</surname><given-names>Eu.</given-names></name></name-alternatives><bio xml:lang="ru"><p>Eugeny Terukov, Dr. Sci. (Eng.) in Technical Sciences in the specialty of "Semiconductors and Dielectrics" (1996), Professor, Head of laboratory, 26 Polytechnicheskaya St., 194021, St Petersburg, Russia</p></bio><bio xml:lang="en"><p>Eugeny Terukov, Dr. Sci. (Eng.) in Technical Sciences in the specialty of "Semiconductors and Dielectrics" (1996), Professor, Head of laboratory, 26 Polytechnicheskaya St., 194021, St Petersburg, Russia</p></bio><email xlink:type="simple">eug.terukov@mail.ioffe.ru</email><xref ref-type="aff" rid="aff-5"/></contrib></contrib-group><aff-alternatives id="aff-1"><aff xml:lang="ru"><institution>National Institute for Astrophysics, Optics and Electronics (INAOE)</institution><country>Мексика</country></aff><aff xml:lang="en"><institution>National Institute for Astrophysics, Optics and Electronics (INAOE)</institution><country>Mexico</country></aff></aff-alternatives><aff-alternatives id="aff-2"><aff xml:lang="ru"><institution>CONACyT-INAOE</institution><country>Мексика</country></aff><aff xml:lang="en"><institution>CONACyT-INAOE</institution><country>Mexico</country></aff></aff-alternatives><aff-alternatives id="aff-3"><aff xml:lang="ru"><institution>R&amp;D Center of Thin Film Technologies in Energetics LLC, (RDC TFTE); Ioffe Physics and technical Institute</institution><country>Россия</country></aff><aff xml:lang="en"><institution>R&amp;D Center of Thin Film Technologies in Energetics LLC, (RDC TFTE); Ioffe Physics and technical Institute</institution><country>Russian Federation</country></aff></aff-alternatives><aff-alternatives id="aff-4"><aff xml:lang="ru"><institution>Saint Petersburg Electrotechnical University "LETI"; Hevel LLC</institution><country>Россия</country></aff><aff xml:lang="en"><institution>Saint Petersburg Electrotechnical University "LETI"; Hevel LLC</institution><country>Russian Federation</country></aff></aff-alternatives><aff-alternatives id="aff-5"><aff xml:lang="ru"><institution>R&amp;D Center of Thin Film Technologies in Energetics LLC, (RDC TFTE); Ioffe Physics and technical Institute; Hevel LLC</institution><country>Россия</country></aff><aff xml:lang="en"><institution>R&amp;D Center of Thin Film Technologies in Energetics LLC, (RDC TFTE); Ioffe Physics and technical Institute; Hevel LLC</institution><country>Russian Federation</country></aff></aff-alternatives><pub-date pub-type="collection"><year>2020</year></pub-date><pub-date pub-type="epub"><day>07</day><month>10</month><year>2020</year></pub-date><volume>23</volume><issue>4</issue><fpage>38</fpage><lpage>47</lpage><permissions><copyright-statement>Copyright &amp;#x00A9; Kosarev А., Cosme I., Mansurova S., Andronikov D., Abramov А., Shakhray I., Terukov E., 2020</copyright-statement><copyright-year>2020</copyright-year><copyright-holder xml:lang="ru">Kosarev А., Cosme I., Mansurova S., Andronikov D., Abramov А., Shakhray I., Terukov E.</copyright-holder><copyright-holder xml:lang="en">Kosarev A., Cosme I., Mansurova S., Andronikov D., Abramov A., Shakhray I., Terukov E.</copyright-holder><license xml:lang="ru" license-type="creative-commons-attribution" xlink:href="https://creativecommons.org/licenses/by/4.0/" xlink:type="simple"><license-p>Данная работа распространяется под лицензией Creative Commons Attribution 4.0.</license-p></license><license xml:lang="en" license-type="creative-commons-attribution" xlink:href="https://creativecommons.org/licenses/by/4.0/" xlink:type="simple"><license-p>This work is licensed under a Creative Commons Attribution 4.0 License.</license-p></license></permissions><self-uri xlink:href="https://re.eltech.ru/jour/article/view/452">https://re.eltech.ru/jour/article/view/452</self-uri><abstract><sec><title>Introduction</title><p>Introduction. PECVD enables fabrication of wide range of advanced materials with various structure such as amorphous, polymorphous, nano-crystalline, nanostructured, microcrystalline etc. and with various electronic properties. The latter can be also changed by different dopingl. PECVD silicon materials are commercially employed in multi-layered PV structures (including ones on flexible substrates). Combining these materials with crystalline silicon active substrate resulted in significant improvement of PCE in hetero junction technology PV structures. Existence of new organic semiconductors (OS) together with understanding of physical properties resulted in fast development of OC PV devices.</p></sec><sec><title>Aim</title><p>Aim. To consider both PECVD and OS materials and to present description of fabrication, structure and electronic properties for device application.</p></sec><sec><title>Materials and methods</title><p>Materials and methods. Devices based on non-crystalline materials, devices based on OS, hybrid devices. PECVD and Spin coating technique was used to deposit materials with tunable properties enabling device engineering possibilities.</p></sec><sec><title>Results</title><p>Results. PECVD and OS materials were analyzed. These materials have different levels of characterization (data volume, interpretation of the results etc.) and of understanding of physics determining device performance. Some examples of these materials in PV including structures with crystalline silicon were considered.</p></sec><sec><title>Conclusion</title><p>Conclusion. Important advantage of both PECVD and OS materials is that fabrication methods are compatible and allow fabrication of great variety of hybrid device structures on crystalline semiconductors. Advantages of such devices are difficult to predict because of lack of data in scientific literature. However a new area in material science and related devices for further exploring and exploiting has appeared.</p></sec></abstract><trans-abstract xml:lang="en"><sec><title>Introduction</title><p>Introduction. PECVD enables fabrication of wide range of advanced materials with various structure such as amorphous, polymorphous, nano-crystalline, nanostructured, microcrystalline etc. and with various electronic properties. The latter can be also changed by different dopingl. PECVD silicon materials are commercially employed in multi-layered PV structures (including ones on flexible substrates). Combining these materials with crystalline silicon active substrate resulted in significant improvement of PCE in hetero junction technology PV structures. Existence of new organic semiconductors (OS) together with understanding of physical properties resulted in fast development of OC PV devices</p></sec><sec><title>Aim</title><p>Aim. To consider both PECVD and OS materials and to present description of fabrication, structure and electronic properties for device application.</p></sec><sec><title>Materials and methods</title><p>Materials and methods. Devices based on non-crystalline materials, devices based on OS, hybrid devices. PECVD and Spin coating technique was used to deposit materials with tunable properties enabling device engineering possibilities.</p></sec><sec><title>Results</title><p>Results. PECVD and OS materials were analyzed. These materials have different levels of characterization (data volume, interpretation of the results etc.) and of understanding of physics determining device performance. Some examples of these materials in PV including structures with crystalline silicon were considered.</p></sec><sec><title>Conclusion</title><p>Conclusion. Important advantage of both PECVD and OS materials is that fabrication methods are compatible and allow fabrication of great variety of hybrid device structures on crystalline semiconductors. Advantages of such devices are difficult to predict because of lack of data in scientific literature. However a new area in material science and related devices for further exploring and exploiting has appeared.</p></sec></trans-abstract><kwd-group xml:lang="ru"><kwd>PECVD materials</kwd><kwd>plasma deposition</kwd><kwd>organic semiconductors</kwd><kwd>photovoltaic devices</kwd><kwd>hybrid photovoltaic devices</kwd></kwd-group><kwd-group xml:lang="en"><kwd>PECVD materials</kwd><kwd>plasma deposition</kwd><kwd>organic semiconductors</kwd><kwd>photovoltaic devices</kwd><kwd>hybrid photovoltaic devices</kwd></kwd-group><funding-group><funding-statement xml:lang="ru">The authors would like greatly appreciate Dr.Y.Kudriavtsev (CINVESTV, Mexico) for many years of collaboration in application of advanced SIMS techniques to study non-crytalline materials, We would like to thank our PhD students Hiram Martinez (Electronics department of INAOE), Antonio J. Olivares-Vargas (Optics department of INAOE) for their dedication to work with both PECVD and organic semiconductors for PV devices and possibility to use their data, also many thanks to engineer Adrian Itzmoyotl for his technical service during fabrication of materials and devices.</funding-statement><funding-statement xml:lang="en">The authors would like greatly appreciate Dr.Y.Kudriavtsev (CINVESTV, Mexico) for many years of collaboration in application of advanced SIMS techniques to study non-crytalline materials, We would like to thank our PhD students Hiram Martinez (Electronics department of INAOE), Antonio J. Olivares-Vargas (Optics department of INAOE) for their dedication to work with both PECVD and organic semiconductors for PV devices and possibility to use their data, also many thanks to engineer Adrian Itzmoyotl for his technical service during fabrication of materials and devices.</funding-statement></funding-group></article-meta></front><back><ref-list><title>References</title><ref id="cit1"><label>1</label><citation-alternatives><mixed-citation xml:lang="ru">Krebs Frederik C. Fabrication and processing of polymer solar cells: A review of printing and coating techniques. Solar Energy Materials &amp; Solar Cells. 2009, vol. 93, iss. 4, pp. 394–412. doi: 10.1016/j.solmat.2008.10.004</mixed-citation><mixed-citation xml:lang="en">Krebs Frederik C. Fabrication and processing of polymer solar cells: A review of printing and coating techniques. 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