Effective dielectric permittivity of ferroelectric film included in parallel-plate and planar ferroelectric capacitors
The characteristics of parallel-plate and planar ferroelectric capacitors are investigated experimentally and theoreti-cally. The size effect in Ba0.3Sr0.7TiO3 included into parallel-plate and planar capacitors is studied.
Authors: S.P.Zubko, A.G.Gagarin, N.Yu.Medvedeva
Direction: Микро- и наноэлектроника
Keywords: Thin film, size effect, ferroelectrics, capacitor
View full article